Short pulse excimer lasers.

High - Intensity Short - Pulse Lasers

Excimer Lasers in Medicine

Introduction Excimer lasers emit light energy, short optical pulses at ultraviolet wavelengths, that results in a unique laser tissue interaction. This has led to an increasing number of studies into medical applications of these lasers in fields such as ophthalmology, urology, cardiology and neurology. The typical excimer laser is operated with a combination of a halogen (fluorine or chlorine)...

Short Pulse Generation Using Semiconducfor Lasers

We have generated picosecond opfic1 pulses with very pure spectral characteristics using semiconductor lasers with monolithic cavities. Fx repetition rates less than 10 GHz, gain-switching of DFB lasers with quantum well loss-gratings is usul. Monolithic colliding pulse mode-locked semiconductor lasers are used to generate short pulses with repetition rate up to 350GHz.

Deep-UV Excimer Lasers

The recent trend in microelectronics towards patterning critical feature sizes of 0.25 m and below has motivated the development of microlithography at the deep ultra-violet (DUV) laser wavelengths of 248 and 1 93 nm. In recent years the performance, reliability, and cost of ownership of excimer light sources have improved. Some key technologies needed for excimer lasers in microlithography inc...

Output properties of short-pulse gain-switched lasers.

A formalism is derived for analyzing the spectral and temporal properties of gain-switched lasers. The development of the longitudinal mode structure from spontaneous emission, limiting linewidths, and over-all spectral characteristics are considered in detail; and applications are discussed.